Shellback Semiconductor Technology designs and manufactures advanced wet processing equipment for semiconductor fabrication. Their solutions include batch spray systems for cleaning, etching, and stripping, as well as carrier cleaning and coat/develop systems, aimed at improving wafer yield and process efficiency.
Funding
Funding not disclosed
Founders
Product
Problem
Semiconductor manufacturing processes, particularly wet processing, require specialized equipment for critical steps like cleaning, etching, and stripping. Maintaining high wafer yield and process efficiency across diverse semiconductor markets necessitates reliable and advanced equipment solutions.
Solution
Shellback Semiconductor Technology provides a comprehensive suite of wet processing equipment designed to meet the rigorous demands of semiconductor fabrication. Their product portfolio includes advanced batch spray systems for cleaning, etching, and stripping applications, as well as specialized equipment for carrier cleaning and coat/develop processes. By offering robust and efficient solutions, Shellback aims to enhance wafer yield and optimize process throughput for manufacturers across various semiconductor sectors. The company leverages its expertise to deliver equipment that supports both established and emerging semiconductor technologies.
Target Audience
The primary target audience includes semiconductor manufacturers, foundries, and research and development facilities involved in the production of power devices, MEMS and sensors, photonics and LEDs, wireless and analog components, memory and storage devices, and advanced packaging solutions.
Features
- **MERCURY+ Batch Spray Systems:** High-throughput batch spray systems for cleaning, etching, and stripping, suitable for 100mm to 200mm wafer sizes.
- **SEMITOOL TORRENT Batch Spray Systems:** Advanced batch spray tools for wet etch and clean processes, featuring proprietary independent flow control nozzles for wafer-to-wafer repeatability.
- **SEMITOOL TORRENT HF Vapor Tool:** Specialized equipment for MEMS spring release and selective oxide etching, utilizing a vertical wafer orientation within an HDPE process chamber.
- **SEMITOOL STORM Carrier Cleaning Systems:** Batch centrifugal spray cleaning tools designed for cleaning wafer carriers, cassettes, FOUPs, and SMIF pods.
- **RITE TRACK Coat Develop Systems:** Production track systems for coat and develop processes, including support for SVG and TEL equipment.
- **Automated Loading Systems:** Options for automated wafer handling, such as the MERCURY+ SP and TORRENT SP systems, to increase throughput and efficiency.
- **Process Applications:** Support for a wide range of applications including post-etch cleans, metal etches, UBM etches, and resist stripping.
- **Cost of Ownership:** Focus on low chemical consumption, low DI water usage, and reduced waste generation.