Park Systems offers advanced nanoscale metrology solutions, including Atomic Force Microscopes (AFMs) and ellipsometers, for high-precision surface analysis and characterization. Their instruments provide distortion-free imaging and preserve tip and sample integrity, enabling accurate measurements for semiconductor fabrication, materials science, and life sciences.
Funding
Funding not disclosed
Founders
Product
Problem
Accurate nanoscale characterization and metrology are critical for advancements in fields such as materials science, semiconductors, and life sciences. However, achieving precise measurements at the nanoscale often requires specialized, sensitive equipment that can be susceptible to environmental interference.
Solution
Park Systems provides advanced nanoscale metrology solutions, including Atomic Force Microscopes (AFMs) and ellipsometers, designed for high-precision surface analysis and characterization. Their product line features research and industrial AFMs engineered with decoupled scanner architectures for distortion-free imaging and True Non-Contact™ technology to preserve tip and sample integrity. For industrial applications, automated AFMs offer high-throughput, precise measurements essential for semiconductor fabrication and display technologies. The company also offers Imaging Spectroscopic Ellipsometry (ISE) for advanced thin-film analysis and White Light Interferometry (WLI) and Nano-Infrared Spectroscopy (NanoIR) for expanded metrology capabilities. To ensure optimal measurement accuracy, Park Systems integrates Active Vibration Isolation (AVI) systems across its product range, mitigating environmental disturbances.
Target Audience
The primary target audience includes researchers and engineers in materials science, semiconductor manufacturing, life sciences, nanotechnology, and advanced display technologies who require high-precision nanoscale metrology and surface characterization.
Features
- **Research AFMs:** Feature decoupled scanner architecture for distortion-free imaging and True Non-Contact™ technology for tip and sample preservation. Includes AI-powered SmartScan for simplified operation and high-resolution nanoscale measurements.
- **Industrial AFMs:** Designed for automated, high-throughput environments, offering advanced 3D metrology and fully automated solutions for semiconductor manufacturing, display technology, and quality assurance.
- **Imaging Spectroscopic Ellipsometry (ISE):** Combines ellipsometry and optical microscopy for advanced microanalysis of thin films, offering spatial resolution down to 1 μm.
- **Nano-Infrared Spectroscopy (NanoIR):** Integrates infrared spectroscopy with AFM for nanoscale chemical analysis.
- **White Light Interferometry (WLI):** Provides high-resolution optical analysis for thin-film characterization.
- **Active Vibration Isolation (AVI) Systems:** Available in various configurations (desktop, modular, laboratory tables, acoustic enclosures, heavy load) to minimize environmental vibrations and enhance measurement stability and accuracy for sensitive instrumentation.
- **Park Crosstalk Elimination Technology:** Utilizes independent, closed-loop XY and Z flexure scanners for accurate nano-resolution data and low noise Z detectors for precise topography measurements.