Onto Innovation
Lumina Instruments develops laser optical scanning equipment specifically designed for the glass manufacturing sector in high-tech applications. Their technology enhances precision in quality control processes, ensuring that glass products meet stringent industry standards.
- Hardware
- Manufacturing / Industry 4.0
Funding
Founders
Founder details are not available yet.
Product
Problem
In advanced manufacturing, particularly in the production of semiconductors, displays, and other high-tech components, ensuring the quality and purity of substrate materials like wafers and panels is critical. Traditional inspection methods may lack the sensitivity to detect nanometer-scale defects and contamination on various substrate types, leading to yield loss and increased production costs.
Solution
The PrimaScan series, developed by Onto Innovation, provides all-surface inspection and imaging for contamination and defectivity on opaque, transparent, and semi-transparent substrates such as wafers, reticles, and glass panels. Utilizing laser-based scanning with proprietary optics and sensing technologies, the system detects nanometer-sized defects, particles, scratches, pits, surface contamination, stains, film stress, and voids. The PrimaScan series is designed for both R&D and high-volume manufacturing, offering high throughput and sensitivity.
Target Audience
The primary target audience includes manufacturers of semiconductors, advanced packaging, displays, and other high-tech components who require stringent quality control of substrate materials.
Features
- Laser-based scanning and imaging for nanometer-scale defect detection
- Multiple detection channels: polarization, slope, bright field, and dark field
- All-surface scan (frontside/backside/edge) and imaging
- Simultaneous frontside/backside inspection for transparent and semi-transparent substrates
- Automated Image Based Defect Classification
- Multiple handling options: wafer, photomask, film frame, JDEC tray, waffle pack
- Support for wafer sizes from 100mm to 450mm and panel sizes up to 600mm x 600mm