Lumina Instruments develops laser optical scanning equipment specifically designed for the glass manufacturing sector in high-tech applications. Their technology enhances precision in quality control processes, ensuring that glass products meet stringent industry standards.
Funding
Funding not disclosed
Founders
Product
Problem
In advanced manufacturing, particularly in the production of semiconductors, displays, and other high-tech components, ensuring the quality and purity of substrate materials like wafers and panels is critical. Traditional inspection methods may lack the sensitivity to detect nanometer-scale defects and contamination on various substrate types, leading to yield loss and increased production costs.
Solution
The PrimaScan series, developed by Onto Innovation, provides all-surface inspection and imaging for contamination and defectivity on opaque, transparent, and semi-transparent substrates such as wafers, reticles, and glass panels. Utilizing laser-based scanning with proprietary optics and sensing technologies, the system detects nanometer-sized defects, particles, scratches, pits, surface contamination, stains, film stress, and voids. The PrimaScan series is designed for both R&D and high-volume manufacturing, offering high throughput and sensitivity.
Target Audience
The primary target audience includes manufacturers of semiconductors, advanced packaging, displays, and other high-tech components who require stringent quality control of substrate materials.
Features
- Laser-based scanning and imaging for nanometer-scale defect detection
- Multiple detection channels: polarization, slope, bright field, and dark field
- All-surface scan (frontside/backside/edge) and imaging
- Simultaneous frontside/backside inspection for transparent and semi-transparent substrates
- Automated Image Based Defect Classification
- Multiple handling options: wafer, photomask, film frame, JDEC tray, waffle pack
- Support for wafer sizes from 100mm to 450mm and panel sizes up to 600mm x 600mm