Jingtuo Semiconductor Technology delivers specialized ozone system solutions for semiconductor, LED, and flat panel display manufacturing. We provide high-purity ozone generators, destructors, and dissolved ozone systems to ensure consistent, ultra-clean gas delivery for advanced deposition techniques like TEOS-O3 CVD and ALD.
Funding
Funding not disclosed
Founders
Product
Problem
Semiconductor, LED, and flat panel display manufacturing processes require precise control of reactive gases like ozone. Inefficient or impure ozone delivery systems can lead to process variability, yield loss, and contamination issues. Existing solutions may lack the necessary purity, concentration, or reliability for advanced fabrication steps.
Solution
Jingtuo Semiconductor Technology provides specialized ozone system solutions engineered for critical semiconductor, LED, and flat panel display manufacturing. Our offerings include high-purity ozone generators, efficient ozone destructors, and dissolved ozone systems designed to meet stringent process requirements. We enable advanced deposition techniques such as TEOS-O3 CVD and ALD by ensuring consistent and ultra-clean ozone gas delivery. Our commitment to quality and performance supports manufacturers in achieving higher yields and process stability.
Target Audience
Our primary customers are manufacturers and equipment providers within the semiconductor, LED, and flat panel display industries who require high-performance, reliable ozone generation and delivery systems for their fabrication processes.
Features
- High-purity, high-concentration plate-type ozone generators designed for semiconductor processes, achieving ppt-level metal impurity content.
- Double-sided discharge and cooling technology for enhanced discharge efficiency in ozone generation.
- Ozone destructors utilizing high-efficiency catalytic converters for safe and complete ozone decomposition.
- Dissolved ozone (DIO3) systems capable of delivering 5-100ppm ozone water with constant concentration and pressure control.
- ODS (Ozone Delivery System) solutions for Micro LED applications featuring cold plasma technology and modular design.
- Integrated gas control systems, including MFCs and pressure regulators, for precise process gas management.
- SEMI-S2 and CE certifications, ensuring compliance with industry safety and performance standards.
- Closed-loop control systems for both ozone gas concentration and dissolved ozone water concentration.
- On-board ozone gas analyzers and dissolved ozone monitors for real-time process feedback and quality assurance.
- Flexible connectivity options, including CF flanges and VCR connectors, for straightforward integration into existing fab infrastructure.